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Siemens reports over 10 times faster EUV lithography simulation with new technique

7 days ago
1 min read

Updated: 4 days ago

16 October 2026. Siemens says its new lithography simulation technique addresses the critical runtime and complexity challenges of leading-edge patterning for AI compute and memory devices.


Siemens reports that the technique is over 10 times faster for EUV lithography simulation.


The company states the technique targets runtime and complexity challenges in leading-edge patterning.


The work covers patterning for AI compute and memory devices, according to the release.


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